JPH01119056U - - Google Patents
Info
- Publication number
- JPH01119056U JPH01119056U JP1464088U JP1464088U JPH01119056U JP H01119056 U JPH01119056 U JP H01119056U JP 1464088 U JP1464088 U JP 1464088U JP 1464088 U JP1464088 U JP 1464088U JP H01119056 U JPH01119056 U JP H01119056U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- film thickness
- thickness distribution
- locus
- diagram showing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 11
- 238000004544 sputter deposition Methods 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 5
- 239000010408 film Substances 0.000 description 3
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1464088U JPH01119056U (en]) | 1988-02-08 | 1988-02-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1464088U JPH01119056U (en]) | 1988-02-08 | 1988-02-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01119056U true JPH01119056U (en]) | 1989-08-11 |
Family
ID=31226022
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1464088U Pending JPH01119056U (en]) | 1988-02-08 | 1988-02-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01119056U (en]) |
-
1988
- 1988-02-08 JP JP1464088U patent/JPH01119056U/ja active Pending